Semiconductor Fluids

Particularly high-quality fluids are used for chillers, ion implanters, dry etchers, and CVD machines.

Our materials meet all requirements, are qualified and tested, and (mostly) are available from stock.

HFE (hydrofluoroether) fluids are specialized cooling and cleaning agents that play an important role in the semiconductor industry. They are characterized by their outstanding properties, including high thermal conductivity, precise boiling temperature, residue-free evaporation, and excellent chemical stability.

In semiconductor manufacturing, HFE fluids are primarily used for precise cleaning, drying, and cooling. They help gently and effectively remove contaminants from sensitive components without damaging the materials. Furthermore, HFE fluids are environmentally friendly and have a low global warming potential, making them a sustainable choice in modern industry.

If you would like to learn more about the applications and benefits of HFE fluids in the semiconductor industry, please contact us.

HFE-7500 (CAS number 297730-93-9) replaces 3M™ Novec™ 7500 and Fluorinert™ FC-3283

HFP-110 (CAS number 6792-31-0) replaces 3M™ Novec™ 7500 and Fluorinert™ FC-3283

HFE-7200 Mixture (CAS number 163702-06-5 and CAS number 163702-05-4) replaces 3M™ Novec™ 7200

PFPE-200 (CAS 69991-67-9) replaces Solvay Galden® HT200

All our materials are tested for purity in an external laboratory and impress with their very high quality.