HFE-7200 Mixture – Heat transfer fluid

High-performance fluid for heat transfer and cleaning (replacement for 3M™ Novec™ 7200)

HFE-7200 Mixture (CAS No. 163702-06-5 and CAS No. 163702-05-4) is a combination of two hydrofluoroether components, specifically optimized for the semiconductor industry. It is used for precise cleaning, drying, and cooling in critical manufacturing processes—particularly in chiller, ion implantation, and CVD systems.

HFE-7200 Mixture (Ethyl Perfluorobutyl/Isobutyl Ether) is a high-performance, clear, and colorless liquid for demanding industrial applications. The product offers outstanding thermal and chemical stability as well as excellent dielectric properties. Thanks to its tightly controlled physical properties (e.g., boiling range, vapor pressure, surface tension), it ensures reproducible process results while providing maximum protection against contamination or corrosion.

Thanks to its low viscosity and extremely low pour point, the fluid remains highly flowable even at low temperatures and ensures consistent thermal performance. Thus, HFE-7200 Mixture is ideally suited for use in semiconductor manufacturing, the electronics industry, and cleaning processes. The fluid is non-flammable, has a low global warming potential (GWP) and no ozone depletion potential (ODP), making it a more environmentally friendly alternative to conventional fluorochemicals.

It is qualified as a direct replacement for 3M™ Novec™ 7200 and meets the strict purity requirements of modern semiconductor fabs.